KUALA LUMPUR, Aug 10 (Bernama) -- CyberOptics® Corporation, a leading global developer and manufacturer of high precision 3D sensing technology solutions, will demonstrate its next generation Airborne Particle Sensor™ technology (APS3) at SEMICON Taiwan.
The technology – CyberOptics’ WaferSense® APS3 – speeds equipment set-up and long-term yields in semiconductor fabs by wirelessly detecting, identifying and monitoring airborne particles, a statement said.
Now in a thinner and lighter form factor to travel through semiconductor tools with ease, the APS3 offers leading accuracy and sensitivity valued by equipment and process engineers.
The APS3 solution incorporates ParticleSpectrum software – a completely new, touch-enabled interface with user-friendly functionality, making it simple to read, record and review small to large airborne particle data and see the effects of cleanings, adjustments and repairs in real-time.
President and Chief Executive Officer of CyberOptics, Dr. Subodh Kulkarni said semiconductor fabs worldwide have adopted the Airborne Particle Sensors.
Dr Kulkarni said the company have further advanced the technology to significantly improve their yields and tool uptime.
SEMICON Taiwan is the premier event in Taiwan for microelectronics manufacturing, starting on Sept 5 to 7 at the Nangang Exhibition Center, Taipei.
CyberOptics will also demonstrate the proprietary 3D Ultra High-Resolution Multi-Reflection Suppression (MRS) Sensor technology that meticulously identifies and rejects reflections caused by shiny components and surfaces at the exhibition.
More information at www.cyberoptics.com
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